Unprecedented Capability

The Lab Tool allows high-precision non-contact measurements of carrier transport properties (e.g. carrier mobility and recombination lifetime) in semiconductors. The Lab Tool is a 300mm manual load system providing measurements directly on product wafers (e.g. SIMS boxes, test structures and other patterned structures). An intuitive, decision based user interface enables quick and efficient recipe creation. The Lab Tool meets SEMI standards.

Built in the USA.